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product
Nexis GC-2030 BIDUFRGA
UFRGA Series
The Ultrafast RGA system utilizes the new Barrier Discharge Ionization Detector (BID) technology coupled with Nexis GC-2030 to create new system GC for ultrafast, high-sensitivity analysis. Since the electrode creating Helium plasma is totally isolated from the carrier gas, there is no chance to contaminate this electrode with a dirty sample. This enables long-term stability.
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Partial Pressure Monitor for RGA
PPM100
Stanford Research Systems, Inc.
The PPM100 is a stand-alone controller/monitor for SRS residual gas analyzers. It measures partial pressures from SRS RGAs and total pressure from up to four capacitance manometers. Graphical output is available on a touchscreen LCD display.
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Quadrupole Mass Spectrometer for Residual Gas Analysis
RGA Series
Systems for the examination of components present in a vessel or evolved from a process. HALO RGA – for residual gas analysis. 3F Series RGA – triple filter mass spectrometers for analytical applications. 3F-PIC – pulse ion counting detection for fast event studies. Measures the concentration of gases and vapours in real time.
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Residual Gas Analyzers, Mass Spectrometers
the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.
