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Photonic Components
Fraunhofer Institute for Telecommunications
The Department of Photonic Components is researching optochips and Photonic Integrated Circuits (PICs) for transmission and reception of more than 100 Gbit / s and the sensors. The department provides production and development services for all activitiesfor the German and international industry. If, for example, you already think of a particular optochip concept, the researchers offer additional advice and take over design and production steps. On the other hand, if you would like to start with a target specification, a feasibility study will begin and your own concept will be developed for you. Researchers are always ready and able to carry out initial production volumes in an ISO certified, qualified manufacturing facility. In addition, e-beam services and diffractive optical elements developed according to specifications are offered.
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E-Beam Power Supplies
Maximize image quality and repeatability. Designed for scanning electron microscope tools, Advanced Energy’s precision e-beam technologies deliver impressive performance, accuracy, and reliability.
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E-Beam Welded Through Hole Shunt Resistors
BWT
These space saving components feature E-Beam welded construction and full RoHS compliancy.
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BSE Detection
SLIM
SLIM™ is an innovative design for under-the-column BSE detection.SLIM™ puts El-Mul’s ScintiFast™ together with a segmented, shaped light guide and Silicon Photomultipliers (SiPM) to create a fast, sensitive, segmented and compact BSE detector for e-beam tools.
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Metrology & Inspection Systems
Our optical and e-beam wafer metrology and inspection products quickly and accurately measure pattern quality before and during high-volume chip manufacturing.
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E-beam Metrology And Inspection
Our HMI e-beam solutions help to locate and analyze individual chip defects amid millions of printed patterns.
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Digital E-Gun Sweep
XYC-20
The XYC-20 E-beam evaporation controller is in a class by itself. The unit can be calibrated by the user to their specific system and e-gun. An algorithm determines the beam error from front to back and side to side within the pocket, eliminating pocket overshoot and burn-thru. The pattern control is effectively made linear saving time in programming and setup. Beam dwell time can vary at each location to compensate for variation in beam density. Six pocket sizes and two shapes can be selected.
